Optical methods for measuring the feature size of optical diffraction gratings with nano-meter accuracy and implementation of suitable feedback control loops

¹ Fraunhofer Institute for Applied Optics and Precision Engineering, Albert-Einstein-Straße 7, 07745 Jena, Germany
² Institute of Applied Physics, Friedrich-Schiller-Universität Jena, Max-Wien-Platz 1, 07743 Jena, Germany

^* Corresponding author: author@e-mail.org

Published online: 13 October 2022

Abstract

Surface relief diffraction gratings offer a high flexibility in their design and thus allow to synchronize their optical performance with the specific requirements of the underlying application. However, the accuracy and the specific control of the manufacturing processes are of vital importance. In this contribution, we present optical methods relying on white-light ellipsometry and how they can be exploited for the measurement of the critical dimensions of manufactured surface relief grating structures. We will furthermore present suitable processes (relying on atomic layer deposition) and how they are used in a feedback loop to control the grating’s feature sizes on the nanometer scale.