EPJ Web of Conferences

Coherent Fourier Scatterometry for defect detection on SiC samples

Jila Rafighdoost, Dmytro Kolenov and Silvania F. Pereira

EPJ Web Conf., 266 (2022) 10015

Published online: 13 October 2022

DOI: 10.1051/epjconf/202226610015

Jila Rafighdoost

Dmytro Kolenov

Silvania F. Pereira

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