EPJ Web of Conferences

An integrated exposure and measurement tool for 5-DOF direct laser writing

Johannes Belkner, Johannes Leineweber, Georg Hein, Alexander Barth, Thomas Kissinger, Thomas Fröhlich and Eberhard Manske

EPJ Web Conf., 309 (2024) 03005

Published online: 31 October 2024

DOI: 10.1051/epjconf/202430903005

Johannes Belkner

Johannes Leineweber

Georg Hein

Alexander Barth

Thomas Kissinger

Thomas Fröhlich

Eberhard Manske

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