EPJ Web of Conferences

High Harmonic Generation driven Extreme Ultraviolet 0^th order Scatterometry for Nanostructure Characterization

Francesco Corazza, Emmanouil Kechaoglou, Leo Guery, Maximilian Lipp, Zhonghui Nie, Lyuba Amitonova and Peter Kraus

EPJ Web Conf., 335 (2025) 03020

Published online: 22 September 2025

DOI: 10.1051/epjconf/202533503020

Francesco Corazza

Emmanouil Kechaoglou

Leo Guery

Maximilian Lipp

Zhonghui Nie

Lyuba Amitonova

Peter Kraus

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