EPJ Web of Conferences

Atomic layer deposition for hafnium oxide-based meta-optics in the ultraviolet spectral range

Thomas Siefke, Svetlana Shestaeva, Daniel Franta, Kristin Gerold, Adriana Szeghalm and Stefanie Kroker

EPJ Web Conf., 335 (2025) 08003

Published online: 22 September 2025

DOI: 10.1051/epjconf/202533508003

Thomas Siefke

Svetlana Shestaeva

Daniel Franta

Kristin Gerold

Adriana Szeghalm

Stefanie Kroker

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