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Express in-situ measurement of single crystal diamond growth/etching rate in microwave plasma: how to perform multiparametric kinetics study in one working day

V.G. Ralchenko, V.Yu. Yurov, E.V. Bushuev, A.P. Bolshakov, E.E. Ashkinazi, I.A. Antonova, E.V. Zavedeev, A.A. Khomich and V.I. Konov

EPJ Web Conf., 149 (2017) 02001

Published online: 04 August 2017

DOI: 10.1051/epjconf/201714902001

V.G. Ralchenko

V.Yu. Yurov

E.V. Bushuev

A.P. Bolshakov

E.E. Ashkinazi

I.A. Antonova

E.V. Zavedeev

A.A. Khomich

V.I. Konov

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eISSN: 2100-014X