EPJ Web Conf.
Volume 149, 201710th International Workshop 2017 “Strong Microwaves and Terahertz Waves: Sources and Applications”
|Number of page(s)||2|
|Section||High power microwave and terahertz applications|
|Published online||04 August 2017|
Express in-situ measurement of single crystal diamond growth/etching rate in microwave plasma: how to perform multiparametric kinetics study in one working day
1 General Physics Institute RAS, Moscow, Russia
2 National Research Nuclear University MEPhI, Moscow, Russia
3 Harbin Institute of Technology, Harbin, P.R. China
4 Institute of Radio Engineering and Electronics RAS, Fryazino, Russia
Published online: 4 August 2017
This article has no abstract.
© The Authors, published by EDP Sciences, 2017
This is an Open Access article distributed under the terms of the Creative Commons Attribution License 4.0, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
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