Open Access
Issue
EPJ Web Conf.
Volume 149, 2017
10th International Workshop 2017 “Strong Microwaves and Terahertz Waves: Sources and Applications”
Article Number 02001
Number of page(s) 2
Section High power microwave and terahertz applications
DOI https://doi.org/10.1051/epjconf/201714902001
Published online 04 August 2017
  1. Bushuev, E.V., Yurov, V.Yu., et al. Synthesis of single crystal diamond by microwave plasma assisted chemical vapor deposition with in situ low coherence interferometric control of growth rate // Diam. Relat. Mater. 2016. V. 66. P 83-89. [CrossRef]
  2. Bushuev, E.V., Yurov, V.Yu., et al. Express in situ measurement of epitaxial CVD diamond film growth kinetics // Diam. Relat. Mater. 2017. V. 72, P. 61–70. [CrossRef]
  3. Maeda, H., Ohtsubo, K. et al. Determination of diamond [100] and [111] growth rate and formation of highly oriented diamond film by microwave plasma-assisted chemical vapor deposition // J. Mater. Res. 1995. V. 10. P. 3115-3123. [CrossRef]
  4. Ivanov, O.A., Muchnikov, A.B. et al. Experimental study of hydrogen plasma etching of (100) single crystal diamond in a MPACVD reactor // Mater. Lett. 2015. V. 151. P. 115-118. [CrossRef]

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