EPJ Web of Conferences

Realization of depth reference samples with surfaces amplitudes between 0.1 nm and 5 nm

Annemarie Finzel, Gregor Dornberg, Stephan Görsch, Martin Mitzschke, Jens Bauer and Frank Frost

EPJ Web Conf., 215 (2019) 03004

Published online: 10 September 2019

DOI: 10.1051/epjconf/201921503004

Annemarie Finzel

Gregor Dornberg

Stephan Görsch

Martin Mitzschke

Jens Bauer

Frank Frost

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