EPJ Web of Conferences

Effect of silicon oxide coating on a silicon nitride focusing grating coupler efficiency

Alexey Prokhodtsov, Alexander Golikov, Pavel An, Vadim Kovalyuk and Gregory Goltsman

EPJ Web Conf., 220 (2019) 02009

Published online: 25 October 2019

DOI: 10.1051/epjconf/201922002009

Alexey Prokhodtsov

Alexander Golikov

Pavel An

Vadim Kovalyuk

Gregory Goltsman

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