EPJ Web of Conferences

The changing of silicon suboxide film thickness as a result of high temperature annealing

Alexandr Zamchiy and Evgeniy Baranov

EPJ Web Conf., 196 (2019) 00053

Published online: 14 January 2019

DOI: 10.1051/epjconf/201919600053

Alexandr Zamchiy

Evgeniy Baranov

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