EPJ Web Conf.
Volume 133, 2017International Conference on Semiconductor Nanostructures for Optoelectronics and Biosensors (IC SeNOB 2016)
|Number of page(s)||6|
|Section||Applications for optoelectronics|
|Published online||15 December 2016|
Zinc oxide films prepared by spray pyrolysis
1 Centre for Innovation and Transfer of Natural Sciences and Engineering Knowledge, University of Rzeszów, S. Pigonia 1, 35-959 Rzeszów, Poland
2 Department of Fundamental Technologies, Ivan Franko Drogobych State Pedagogical University, 24 Ivan Franko str., 82100, Drogobych, Ukraine
Corresponding author: email@example.com
Published online: 15 December 2016
In this work we developed and tested spray pyrolysis system for layers deposition. In the system we have used ultrasonic apparatus (nebulizator) as a sprayer. A zinc nitrate aqueous solution has been used as a precursor solution. The idea of the method is the decomposition of nitrate on a hot substrate according to the reaction Zn(NO3)2 → ZnO +2 NO2 +1/2O2. The layers were grown on glass, (001)Si and KCl substrates at the temperatures 300 – 500°C. The thickness of the obtained layers was in the range 50 – 500 nm, depending on the growth time and rate. The influence of substrate temperature on the morphology of the layers has been studied by SEM method. The energy gap of the layers was found to be the range of 3.26-3.3 eV from their absorption spectra.
© The Authors, published by EDP Sciences, 2017
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