EPJ Web Conf.
Volume 157, 201722 Topical Conference on Radio-Frequency Power in Plasmas
|Number of page(s)||4|
|Published online||23 October 2017|
RF plasma generation in the chamber with the conducting walls
1 Joint Institute for High Temperatures of the Russian Academy of Sciences (JIHT RAS), 125412, Moscow, Russia
2 Moscow Institute of Physics and Technology (MIPT), 141701, Dolgoprudny, Moscow Region, Russia
* Corresponding author: email@example.com
Published online: 23 October 2017
This work is devoted to study of inductively coupled RF discharge within a metal chamber with a diameter of about 1 m and a length of about 2 m in argon gas (RF frequency is 5.28 MHz). The spatial distributions of electron temperature and density depending on the magnetic induction (from 0 to 0.2 T), plasma-forming gas pressure (0.1 − 10 mTorr) and RF power absorbed in the plasma are presented. For fixed gas pressure (6 mTorr) electron temperature decrease with increasing of magnetic field was found.
© The authors, published by EDP Sciences, 2017
This is an Open Access article distributed under the terms of the Creative Commons Attribution License 4.0, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
Current usage metrics show cumulative count of Article Views (full-text article views including HTML views, PDF and ePub downloads, according to the available data) and Abstracts Views on Vision4Press platform.
Data correspond to usage on the plateform after 2015. The current usage metrics is available 48-96 hours after online publication and is updated daily on week days.
Initial download of the metrics may take a while.