Open Access
| Issue |
EPJ Web Conf.
Volume 157, 2017
22 Topical Conference on Radio-Frequency Power in Plasmas
|
|
|---|---|---|
| Article Number | 03062 | |
| Number of page(s) | 4 | |
| Section | Standard Papers | |
| DOI | https://doi.org/10.1051/epjconf/201715703062 | |
| Published online | 23 October 2017 | |
- V. P. Smirnov, A. A. Samokhin, N. A. Vorona et al. Plasma Phys. Rep., 39, 456 (2013) [CrossRef] [Google Scholar]
- A. I. Morozov, Introduction to Plasma Dynamics (CRC Press, 2012) [Google Scholar]
- N. A. Vorona, A. V. Gavrikov, A. A. Samokhin et al., Phys. Atom. Nuclei, 78, 1624 (2015) [CrossRef] [Google Scholar]
- F. F. Chen, in High Density Plasma Sources, edited by O. A. Popov (Noyes, New York, 1995) [Google Scholar]
- R. Freeman, S. Agnew, F. Anderegg et al., AIP Conf. Proc, 694, 403 (2003) [EDP Sciences] [Google Scholar]
- C. E. Ahfeld, J. D. Wagoner, D. L. Sevier et al., Fusion Engineering 2005, Twenty-First IEEE/NPS Symposium, 1 (2005) [Google Scholar]
- A. Litvak, S. Agnew, F. Anderegg, B. Cluggish et al., 30th EPS Conf. Contr. Fusion and Plasma Phys,. 27A, O-1.6A (2003) [Google Scholar]
- P. Chabert, N. Braithwaite, Physics of Radio-Frequency Plasmas (Cambridge University Press, 2011) [Google Scholar]
- V. A. Lisovskiy, V. D. Yegorenkov, J. Phys. D: Appl. Phys., 31, 3349 (1998) [CrossRef] [Google Scholar]
- B. P. Cluggish, F. A. Anderegg, R. L. Freeman et. al., Phys. Plasmas, 12, 057101 (2005) [CrossRef] [Google Scholar]
- P. Y. Nabhiraj, Ranjini Menon, G. Mohan Rao et. al, Nucl. Instrum. Methods Phys. Res. A, 621, 57 (2010) [CrossRef] [Google Scholar]
- B. W. Longmier, A. D. Gallimore, N. Hershkowitz, Plasma Sources Sci. Technol., 21, 015007 (2012) [CrossRef] [Google Scholar]
- E. A. Kralkina, P. A. Nekliudova, V. B. Pavlov et al., Plasma Sources Sci. Technol., 26, 055006 (2017) [CrossRef] [Google Scholar]
- E. A. Kral’kina, Phys. Usp., 51, 493 (2008) [CrossRef] [Google Scholar]
- M. H. Khater, L. J. Overzet, J. Vac. Sci. Technol. A, 19, 785 (2001) [CrossRef] [Google Scholar]
- F. F. Chen, Lecture Notes on Principles of Plasma Processing (Plenum/Kluwer Publishers, 2002) [Google Scholar]
Current usage metrics show cumulative count of Article Views (full-text article views including HTML views, PDF and ePub downloads, according to the available data) and Abstracts Views on Vision4Press platform.
Data correspond to usage on the plateform after 2015. The current usage metrics is available 48-96 hours after online publication and is updated daily on week days.
Initial download of the metrics may take a while.