EPJ Web Conf.
Volume 196, 2019XV All-Russian School-Conference of Young Scientists with International Participation “Actual Problems of Thermal Physics and Physical Hydrodynamics”
|Number of page(s)||5|
|Published online||14 January 2019|
Morphology and composition of silica nanowires synthesized on indium and tin catalysts
Kutateladze Institute of Thermophysics SB RAS, Ac. Lavrentiev Ave. 1, 630090 Novosibirsk, Russia
Published online: 14 January 2019
Silicon nanowires were synthesized by electron beam plasmaenhanced chemical vapor deposition. The synthesis was carried out using indium and tin catalyst with an average particle size of 100 and 660 nm, respectively, in the temperature range 100-270 °C for indium and 200-335 °C for tin. The minimum (optimum) temperature was found at which an oriented array of microropes was formed. This temperature was 200 °C for indium and 335 °C for tin. In addition, it was found that the formation of individual microropes on the tin catalyst occurred at a temperature lower than the eutectic temperature (232 °C). For indium, this effect was not observed. The silica nanowires synthesized on both catalysts consist of SiOx with x ranging from 1.9 to 2 for all temperatures.
© The Authors, published by EDP Sciences, 2019
This is an Open Access article distributed under the terms of the Creative Commons Attribution License 4.0, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
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