| Issue |
EPJ Web Conf.
Volume 266, 2022
EOS Annual Meeting (EOSAM 2022)
|
|
|---|---|---|
| Article Number | 10023 | |
| Number of page(s) | 2 | |
| Section | Topical Meeting (TOM) 10- Frontiers in Optical Metrology | |
| DOI | https://doi.org/10.1051/epjconf/202226610023 | |
| Published online | 13 October 2022 | |
https://doi.org/10.1051/epjconf/202226610023
Multi-beam Coherent Fourier Scatterometry
Optics Research Group, Imaging Physics Department, Faculty of Applied Sciences, Delft University of Technology, Lorentzweg 1, 2628 CJ Delft, The Netherlands
* Corresponding author: s.soman@tudelft.nl
Published online: 13 October 2022
Recent technological advancements in the past decades have been driven by the miniaturisation of devices using surfaces with nano-scale features. These advancements require fast, large area measurement techniques that can be used in process control to detect surface contaminations or to monitor fabrication quality. Here we present a modified version of the scanning coherent Fourier scatterometer with multiple beams that can be used to scan larger areas without increasing the scan time or decreasing the spatial resolution.
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