| Issue |
EPJ Web Conf.
Volume 287, 2023
EOS Annual Meeting (EOSAM 2023)
|
|
|---|---|---|
| Article Number | 04008 | |
| Number of page(s) | 2 | |
| Section | Topical Meeting (TOM) 4- Nanophotonics | |
| DOI | https://doi.org/10.1051/epjconf/202328704008 | |
| Published online | 18 October 2023 | |
https://doi.org/10.1051/epjconf/202328704008
Robust method of metrology for direct phase measurement for nano-antennas
Université Paris-Saclay, ONERA, Optique et techniques associées, 91123, Palaiseau, France
* Corresponding author: cecile.le_gall@onera.fr
Published online: 18 October 2023
Optical metasurfaces allow the development of original and more and more complex optical functions. They are therefore facing a design and characterization problem. Indeed, they are more and more composed of complex patterns, with different types of antennas and non-periodic. This is why it is important to build libraries of nano-structures that can be used as building blocks to compose optical functions. Therefore, we propose a direct phase measurement metrology method for optical nanostructures. Using lateral shift interferometry, our technique allows to simultaneously characterize in amplitude and phase nano-antennas of all types, shapes and materials, and thus to experimentally establish a library of nano-antennas. Our method brings an additional tool in the design of nano-antennas, which completes the existing simulation tools, by allowing to test all types of nano-antennas.
© The Authors, published by EDP Sciences, 2023
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