Advances in machine learning for large-scale manufacturing of photonic circuits

Enablence Technologies Inc., 390 March Road, Ottawa, Canada K2K 0G7

^* Corresponding author: ksenia.yadav@enablence.com

Published online: 18 October 2023

Abstract

Machine learning has opened a new realm of possibilities in photonic circuit design and manufacturing. First, we describe our approach of using deep learning to optimize the multi-dimensional parameter space for hundreds of optical chips on a mask, resulting in homogeneity of performance in high volume applications. Second, we present our approach of using a support vector machine to predict the performance of optical devices by wafer probing. This approach eliminates the expensive and labour-intensive process of optical chip testing, and allows unprecedented control over the fabrication process, including in-situ monitoring of wafer fabrication and real-time process adjustments. The combination of these two approaches paves the way for accelerated adoption of photonics in high volume applications.