| Issue |
EPJ Web Conf.
Volume 287, 2023
EOS Annual Meeting (EOSAM 2023)
|
|
|---|---|---|
| Article Number | 14010 | |
| Number of page(s) | 2 | |
| Section | Opto-electronic Nanotechnologies and Microsystems (ONM) | |
| DOI | https://doi.org/10.1051/epjconf/202328714010 | |
| Published online | 18 October 2023 | |
https://doi.org/10.1051/epjconf/202328714010
Thermo-optic phase shifter based on amorphous silicon carbide
1 Mediterranea University of Reggio Calabria, DIIES Dept., 89124 Reggio Calabria, Italy
2 Technical University of Denmark, DTU Electro, 2800 Lyngby, Denmark
3 Université Grenoble Alpes, CNRS, Grenoble INP, SIMaP, 38000 Grenoble, France
4 University of Naples Federico II, DIETI Dept., 80125 Naples, Italy
* Corresponding author: This email address is being protected from spambots. You need JavaScript enabled to view it.
Published online: 18 October 2023
Abstract
We report the preliminary experimental results for an amorphous silicon carbide (a-SiC) thermo-optic phase shifter (TOPS). This device is based on microring resonator (MRR) structure with a titanium (Ti) heater placed on the top of the device, separated by 1.5 μm thick SiO2 to reduce the optical loss. The proposed a-SiC microring has a thickness and a radius of 1.1 μm and 33 μm, respectively. By applying an electrical power in the Ti heater, a resonance wavelength shift at an optical wavelength of λ=1550 nm is shown, and the extracted thermal tunability is 52.2 pm/mW.
© The Authors, published by EDP Sciences, 2023
This is an Open Access article distributed under the terms of the Creative Commons Attribution License 4.0, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
Current usage metrics show cumulative count of Article Views (full-text article views including HTML views, PDF and ePub downloads, according to the available data) and Abstracts Views on Vision4Press platform.
Data correspond to usage on the plateform after 2015. The current usage metrics is available 48-96 hours after online publication and is updated daily on week days.
Initial download of the metrics may take a while.