Laser-based fabrication chain enabling high quality mini aspheres

OST Eastern Switzerland University of Applied Sciences, Institute for Microtechnology and Photonics, 9471 Buchs, Switzerland

^* Corresponding author: sven.laemmler@ost.chs

Published online: 31 October 2024

Abstract

In recent years, 3D machining in glass for micro-components has seen a notable boost, notably with the development of a novel optical fabrication chain. This approach uses lasers for shaping and polishing, enabling the creation of complex mini-optics efficiently. The process begins with selective laser-induced etching (SLE) to define the optics’ outer shape and surface figure. Subsequent polishing, using a “one-shot laser polishing” technique, removes imperfections and reduces roughness in a single step, achieving optical-grade smoothness. This fabrication chain is applicable to mini-aspheres as well, enhancing their production efficiency. Additionally, it allows for wafer-level production, where multiple mini-optics are interconnected on a single glass substrate.