| Issue |
EPJ Web Conf.
Volume 309, 2024
EOS Annual Meeting (EOSAM 2024)
|
|
|---|---|---|
| Article Number | 06005 | |
| Number of page(s) | 2 | |
| Section | Topical Meeting (TOM) 6- Optical Materials | |
| DOI | https://doi.org/10.1051/epjconf/202430906005 | |
| Published online | 31 October 2024 | |
https://doi.org/10.1051/epjconf/202430906005
Epitaxial LiNbO3 growth and layer transfer for thin-film electro-optic modulator realization
1 Département Temps-Fréquence, FEMTO-ST, Besançon, France
2 R&I, Exail Photonics, Besançon, France
3 Annealsys, Montpellier, France
4 Institut Universitaire de France
* Corresponding author: gregoire.larger@exail.com
Published online: 31 October 2024
The aim of the PhD project is to develop a new trend in modulation system for Exail company: thin film (<1 μm) lithium niobate (LN) electro-optic modulator. It exhibits better performance in term of bandwidth, power consumption and footprint than legacy ones [1-3]. This PhD is a cooperation between Exail photonics which is world-renowned for the performances of their electro-optic modulators and FEMTO-ST institute which can offer the possibility to grow stoichiometric LN thin film by means of direct liquid injection metalorganic chemical vapor deposition (DLI-MOCVD). This cooperation opens the possibility to obtain industrialization of optical device based on CVD LN stoichiometric layers which allow to have enhanced performances such as higher electro-optic coefficient than that of congruent compositions of commercial single crystals. Thus, all steps from MOCVD layer deposition to modulator realization can be done here in Besançon.
© The Authors, published by EDP Sciences, 2024
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