| Issue |
EPJ Web Conf.
Volume 323, 2025
22nd International Metrology Congress (CIM2025)
|
|
|---|---|---|
| Article Number | 12003 | |
| Number of page(s) | 4 | |
| Section | Electromagnetism | |
| DOI | https://doi.org/10.1051/epjconf/202532312003 | |
| Published online | 07 April 2025 | |
https://doi.org/10.1051/epjconf/202532312003
Nanoscale Calibration Standards for On-Wafer S-Parameters measurements up to 110 GHz
1 LNE Laboratoire National de Métrologie et d’Essais, Trappes, France
2 Univ. Lille, CNRS, Centrale Lille, Univ. Polytechnique Hauts-de-France, UMR 8520 - IEMN - Institut d’Electronique de Microélectronique et de Nanotechnologie Lille, France
* Corresponding author: Daouda.Seck@lne.fr
Published online: 7 April 2025
We report the first experimental results on the design and fabrication of nanoscale on-wafer calibration standards operating up to 110 GHz. The propagation constant and effective permittivity of coplanar waveguide (CPW) transmission lines (TLs) are extracted from raw S-parameters using the Thru-Reflect-Line (TRL) method. Experimental data show deviations in extracted propagation characteristics when comparing nanostructures to microscale structures.
© The Authors, published by EDP Sciences, 2025
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