EPJ Web Conf.
Volume 157, 201722 Topical Conference on Radio-Frequency Power in Plasmas
|Number of page(s)||4|
|Published online||23 October 2017|
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- V.I. Arkhipenko et al., Journal of applied physics, 116(12) (2014) [CrossRef]
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- Ansoft HFSS, http://www.ansys.com/Products/Simulation+Technology/Electromagnetics/High-Performance+Electronic+Design/ANSYS+HFSS
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