EPJ Web Conf.
Volume 157, 201722 Topical Conference on Radio-Frequency Power in Plasmas
|Number of page(s)||4|
|Published online||23 October 2017|
- O. Sakai, K. Tachibana, Plasma Sources Sci. Techn., 21(1) (2012) [CrossRef] [Google Scholar]
- J. Lo, J.Sokoloff et al., Applied Physics Letters, 96 (2010) [Google Scholar]
- V.I. Arkhipenko et al., Journal of applied physics, 116(12) (2014) [CrossRef] [Google Scholar]
- H.R. Griem, Spectral lines broadening (Academic Press, New York and London, 1974). [Google Scholar]
- Ansoft HFSS, http://www.ansys.com/Products/Simulation+Technology/Electromagnetics/High-Performance+Electronic+Design/ANSYS+HFSS [Google Scholar]
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