Open Access
EPJ Web Conf.
Volume 215, 2019
EOS Optical Technologies
Article Number 05002
Number of page(s) 2
Section Manufacturing, Tolerancing and Testing of Optical Systems (MOS) – Session 5
Published online 10 September 2019
  1. H. Liang, F. Kaufman, R. Sevilla, S. Anjur. „Wear phenomena in chemical mechanical polishing.“ (1997) [Google Scholar]
  2. J. Luo, D. Dornfeld, „Material Removal Mechanism in Chemical Mechanical Polishing: Theory and Modeling“ (2001) [Google Scholar]
  3. J. Bliedtner, G. Gräfe, „Optiktechnologie Grundlagen Verfahren Anwendungen – Beispiele“, Hanser Verlag (2010), ISBN: 978-3-446-42215-5 [CrossRef] [Google Scholar]
  4. R. Almeida, R. Börret, D.K. Harrison, A. Desilva, Influence of different polishing materials in the material removal of steel samples (Production & Manufacturing Research, 2018) [Google Scholar]

Current usage metrics show cumulative count of Article Views (full-text article views including HTML views, PDF and ePub downloads, according to the available data) and Abstracts Views on Vision4Press platform.

Data correspond to usage on the plateform after 2015. The current usage metrics is available 48-96 hours after online publication and is updated daily on week days.

Initial download of the metrics may take a while.