Open Access
Issue
EPJ Web Conf.
Volume 215, 2019
EOS Optical Technologies
Article Number 05002
Number of page(s) 2
Section Manufacturing, Tolerancing and Testing of Optical Systems (MOS) – Session 5
DOI https://doi.org/10.1051/epjconf/201921505002
Published online 10 September 2019
  1. H. Liang, F. Kaufman, R. Sevilla, S. Anjur. „Wear phenomena in chemical mechanical polishing.“ (1997) [Google Scholar]
  2. J. Luo, D. Dornfeld, „Material Removal Mechanism in Chemical Mechanical Polishing: Theory and Modeling“ (2001) [Google Scholar]
  3. J. Bliedtner, G. Gräfe, „Optiktechnologie Grundlagen Verfahren Anwendungen – Beispiele“, Hanser Verlag (2010), ISBN: 978-3-446-42215-5 [CrossRef] [Google Scholar]
  4. R. Almeida, R. Börret, D.K. Harrison, A. Desilva, Influence of different polishing materials in the material removal of steel samples (Production & Manufacturing Research, 2018) [Google Scholar]

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