Open Access
Issue |
EPJ Web Conf.
Volume 248, 2021
V International Conference “Modeling of Nonlinear Processes and Systems“ (MNPS-2020)
|
|
---|---|---|
Article Number | 04001 | |
Number of page(s) | 5 | |
Section | Workshop on Advanced Materials Processing and Smart Manufacturing | |
DOI | https://doi.org/10.1051/epjconf/202124804001 | |
Published online | 26 April 2021 |
- Handbook of Plasma Immersion Ion Implantation and Deposition, A. Anders (Ed.) (JohnWiley & Sons, Inc., New York, 2000) [Google Scholar]
- N.N. Koval, A.I. Ryabchikov, D.O. Sivin, I.V. Lopatin, O.V. Krysina, Yu.H. Akhmadeev, D.Yu. Ignatov, Surf. Coat. Technol., 340, 152 (2018) [Google Scholar]
- D. Vempaire, J. Pelletier, A. Lacoste, S. Béchu, J. Sirou, S. Miraglia, D. Fruchart, Plasma Phys. and Contr. Fusion., 47, A153 (2005) [Google Scholar]
- A. Anders, Cathodic Arcs: From Fractal Spots to Energetic Condensation (Springer, New York, 2008) [Google Scholar]
- A. Anders, J. Appl. Phys., 121, 171101 (2017) [CrossRef] [Google Scholar]
- J.C. Avelar-Batista, E. Spain, J. Housden, A. Matthews, Surf. Coat. Technol., 200, 1954 (2005) [CrossRef] [Google Scholar]
- S. Grigoriev, A. Metel, NATO Science Series, Series II: Mathematics, Physics And Chemistry, 155, 147 (2004) [Google Scholar]
- C. Ruset, E. Grigore, Surf. Coat. Technol., 156, 159 (2002) [CrossRef] [Google Scholar]
- C. Ruset, E. Grigore, G.A. Collins, K.T. Short, F. Rossi, N. Gibson, H. Dong, T. Bell, Surf. Coat. Technol., 174-175, 698 (2003) [Google Scholar]
- E. Grigore, C. Ruset, K. Short, D. Hoeft, H. Dong, X.Y. Li, T. Bell, Surf. Coat. Technol., 200, 744 (2005) [Google Scholar]
- A.S. Metel, V.P. Bolbukov, M.A. Volosova, S.N. Grigoriev, Yu.A. Melnik, Instrum. Exp. Tech., 57, 345 (2014) [CrossRef] [Google Scholar]
- M. Volosova, S. Grigoriev, A. Metel, A. Shein, Coatings, 8, 287 (2018) [CrossRef] [Google Scholar]
- A.V. Hayes, V. Kanarov, B. Vidinsky, Rev. Sci. Instrum. 67, 1638 (1996) [CrossRef] [Google Scholar]
- E.M. Oks, A.V. Vizir, G.Yu. Yushkov, Rev. Sci. Instrum. 69, 853 (1998) [Google Scholar]
- A.S. Metel, S.N. Grigoriev, Yu.A. Melnik, V.P. Bolbukov, Instrum. Exp. Tech., 55, 288 (2012) [Google Scholar]
- S.N. Grigoriev, Yu.A. Melnik, A.S. Metel, V.V. Panin, Instrum. Exp. Tech., 52, 602 (2009) [Google Scholar]
- A. Metel, S. Grigoriev, Yu. Melnik, V. Panin, V. Prudnikov, Japan. J. Appl. Phys., 50, 08JG04 (2011) [Google Scholar]
- A.S. Metel, S.N. Grigoriev, Yu.A. Melnik, V.V. Panin, Plasma Phys. Rep., 35, 1058 (2009) [CrossRef] [Google Scholar]
- M.A. Lieberman, A.J. Lichtenberg, Principles of Plasma Discharges and Materials Processing (Hoboken: John Wiley & Sons, 2005) [Google Scholar]
- I. Langmuir, Phys. Rev., 33, 6 (1929) [Google Scholar]
- E.W. McDaniel, Collision Phenomena in Ionized Gases (Willey, New York, 1964) [Google Scholar]
- A.V. Phelps, J. Phys. Chem. Ref. Data., 20, 557 (1991) [Google Scholar]
- A.V. Phelps, C.H. Greene, J.P. Burke, J. Phys. B: At. Mol. Opt. Phys., 33, 2965 (2000) [Google Scholar]
- M. Kaminsky, Atomic and ionic impact phenomena on metal surfaces (Springer-Verlag, Berlin, 1965) [Google Scholar]
- I. Danilov, M. Hackert-Oschätzchen, M. Zinecker, G. Meichsner, J. Edelmann, A. Schubert, Micromachines, 10, 214 (2019) [Google Scholar]
- A.M. Chirkov, A.P. Rybalko, Ju.I. Rogalskij, et al, Patent of the Russian Federation No. 2381094 of 10.02.2010 [Google Scholar]
- N.N. Koval, A.D. Teresov, Y.F. Ivanov, E.A. Petrikova, Patent of the Russian Federation No. 2619543 of 16.05.2017 [Google Scholar]
- V.P. Kudrya, Yu.P. Maishev. Mikroelektronika, 47, 51 (2018) [Google Scholar]
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