Open Access
Issue
EPJ Web Conf.
Volume 266, 2022
EOS Annual Meeting (EOSAM 2022)
Article Number 03013
Number of page(s) 2
Section Topical Meeting (TOM) 3- Optical System Design, Tolerancing and Manufacturing
DOI https://doi.org/10.1051/epjconf/202226603013
Published online 13 October 2022
  1. N.A. Hagen et al., Optical Engineering 52, 1 (2013) [Google Scholar]
  2. R. Shogenji et al., Opt. Express 12, 1643 (2004) [CrossRef] [Google Scholar]
  3. M. Hubold et al., Opt. Express 29, 7361 (2021) [CrossRef] [Google Scholar]
  4. M. Hubold et al., Ultra-compact snapshot multispec- tral camera based on micro-optics and mono lithi- cally fabricated filter array, in 122. Jahrestagung der DGaO, edited by G. Häusler, C. Faber (DGaO Pro- ceedings, 2021), Vol. 1, pp. 1–2 [Google Scholar]
  5. H.C. Eckstein et al., High dynamic grayscale lithogra- phy with an LED-based micro-image stepper, in Optical Microlithography XXIX, edited by A. Erdmann, J. Kye, International Society for Optics and Photonics (SPIE, 2016), Vol. 9780, pp. 62 – 68 [Google Scholar]

Current usage metrics show cumulative count of Article Views (full-text article views including HTML views, PDF and ePub downloads, according to the available data) and Abstracts Views on Vision4Press platform.

Data correspond to usage on the plateform after 2015. The current usage metrics is available 48-96 hours after online publication and is updated daily on week days.

Initial download of the metrics may take a while.