Open Access
| Issue |
EPJ Web Conf.
Volume 335, 2025
EOS Annual Meeting (EOSAM 2025)
|
|
|---|---|---|
| Article Number | 03041 | |
| Number of page(s) | 2 | |
| Section | Topical Meeting - Applications of Optics and Photonics | |
| DOI | https://doi.org/10.1051/epjconf/202533503041 | |
| Published online | 22 September 2025 | |
- S. Roy, A.C. Assafrao, S.F. Pereira, H.P. Urbach, Coherent Fourier scatterometry for detection of nanometer-sized particles on a planar substrate surface, Opt. Express 22, 13250-13262 (2014). µhttps://doi.org/10.1364/OE.22.013250 [Google Scholar]
- A. Paul, D. Kolenov, S.F. Pereira, Coherent Fourier scatterometry for particle detection on structured surfaces, in Proc. EPJ Web of Conf., EOSAM 266, 10014 (2022). µhttps://doi.org/10.1051/epjconf/202226610014 [Google Scholar]
- A. Paul, D. Kolenov, T. Scholte, S.F. Pereira, Coherent Fourier scatterometry: a holistic tool for inspection of isolated particles or defects on gratings, Appl. Opt. 62, 7589-7595 (2023). µhttps://doi.org/10.1364/AO.503350 [Google Scholar]
- A. Paul, R. Wever, S. Soman, S.F. Pereira, Utilizing focused field as a probe for shape determination of subwavelength structures via coherent Fourier scatterometry, Phys. Rev. Appl. 23, 024016 (2025). µhttps://doi.org/10.1103/PhysRevApplied.23.024016 [Google Scholar]
- N. Kumar, P. Petrik, G.K.P. Ramanandan, O.E. Gawhary, S. Roy, S.F. Pereira, W.M.J. Coene, H.P. Urbach, Reconstruction of sub-wavelength features and nano-positioning of gratings using coherent Fourier scatterometry, Opt. Express 22, 24678-24688 (2014). µhttps://doi.org/10.1364/OE.22.024678 [CrossRef] [Google Scholar]
- A. Paul, J. Rafighdoost, X. Dou, S.F. Pereira, Investigation of coherent Fourier scatterometry as a calibration tool for determination of steep side wall angle and height of a nanostructure, Meas. Sci. Technol. 35, 075202 (2024). µhttps://doi.org/10.1088/1361-6501/ad3773 [Google Scholar]
- J. Rafighdoost, D. Kolenov, S.F. Pereira, Coherent Fourier Scatterometry for detection of killer defects on silicon carbide samples, IEEE Transactions on Semiconductor Manufacturing 37, 124-128 (2023). µhttps://doi.org/10.1109/TSM.2023.3337720 [Google Scholar]
- S. Soman, S.F. Pereira, Beam scanning coherent Fourier scatterometry, in Proc. SPIE 13024, Optical Instrument Science, Technology, and Applications III, 1302408 (2024). µhttps://doi.org/10.1117/12.3022937 [Google Scholar]
- S. Soman, R.C. Horsten, T. Scholte, S.F. Pereira, Multi-beam coherent Fourier scatterometry, Meas. Sci. Technol. 35, 075905 (2024). µhttps://doi.org/10.1088/1361-6501/ad3b2a [Google Scholar]
- H. Yin, D. Kolenov, S.F. Pereira, Coherent Fourier scatterometry nanoparticle detection enhanced by synthetic optical holography, Optics Letters 47, 3840-3843 (2022). µhttps://doi.org/10.1088/1361-6501/ad3b2a [Google Scholar]
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