| Issue |
EPJ Web of Conferences
Volume 6, 2010
ICEM 14 – 14th International Conference on Experimental Mechanics
|
|
|---|---|---|
| Article Number | 26003 | |
| Number of page(s) | 8 | |
| Section | Thin Films and Coatings | |
| DOI | https://doi.org/10.1051/epjconf/20100626003 | |
| Published online | 10 June 2010 | |
https://doi.org/10.1051/epjconf/20100626003
Mechanical characterization of nanostructured thin films at different scales
1
Institut P’ CNRS - Université de Poitiers - ENSMA, UPR
3346, 86962
Futuroscope,
France
2
Synchrotron SOLEIL, L'Orme des Merisiers,
BP 48,
91192
Gif sur Yvette,
France
3
LPMTM, UPR 9001 CNRS, Université Paris-Nord,
93430
Villetaneuse,
France
4
Laboratoire PIMM, ENSAM, 151, Boulevard de l'Hôpital,
75013
Paris,
France
5
LMT Cachan, 61 Avenue du Président Wilson
94235
CACHAN Cedex,
France
The mechanical behaviour of multilayered W/Cu thin films on polyimide substrate has been investigated at different scales and using complementary X-ray techniques and compared to finite element analysis. Mechanical testing has been carried out using a new biaxial tensile machine which allows for testing in controlled biaxial loading condition. This device has been developed for synchrotron measurements at DiffAbs beamline of the French synchrotron radiation facility (SOLEIL, Saint Aubin).
© Owned by the authors, published by EDP Sciences, 2010
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