| Issue |
EPJ Web of Conferences
Volume 6, 2010
ICEM 14 – 14th International Conference on Experimental Mechanics
|
|
|---|---|---|
| Article Number | 26002 | |
| Number of page(s) | 7 | |
| Section | Thin Films and Coatings | |
| DOI | https://doi.org/10.1051/epjconf/20100626002 | |
| Published online | 10 June 2010 | |
https://doi.org/10.1051/epjconf/20100626002
Residual stresses in AlCrN PVD thin films
Institut P’ CNRS - Université de Poitiers - ENSMA, UPR
3346, 86962
Futuroscope,
France
Residual stresses may affect the mechanical stability of high quality coatings such as Al1-xCrxN. In this study, two different physical vapour deposition techniques leading to different residuals stress states have been used for depositing Al1-xCrxN coatings varying the chromium content. The structure and residual stress state have been investigated in Al1-xCrxN coatings deposited on silicon substrates using X-ray diffraction, curvature measurements and nanoindentation. The obtained results are compared to literature and commented in view of the coating microstructure.
© Owned by the authors, published by EDP Sciences, 2010
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